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A novel stylus profiler without nonlinearity and parasitic motion for FPD inspection system

Jung, H.S. / Hong, M.-S. / Lee, S.-H. / Park, J.H. / Kang, D.W. / Lee, M.G.

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A novel stylus profiler without nonlinearity and parasitic motion for FPD inspection system

Jung, H.S. / Hong, M.-S. / Lee, S.-H. / Park, J.H. / Kang, D.W. / Lee, M.G.

A novel stylus profiler without nonlinearity and parasitic motion for FPD inspection system

Jung, H.S. / Hong, M.-S. / Lee, S.-H. / Park, J.H. / Kang, D.W. / Lee, M.G.

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Document information

Title:

A novel stylus profiler without nonlinearity and parasitic motion for FPD inspection system

Contributors:

Jung, H.S. (author) / Hong, M.-S. (author) / Lee, S.-H. (author) / Park, J.H. (author) / Kang, D.W. (author) / Lee, M.G. (author)

Published in:

JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY ; 21 ; 1491-1497

Publication date:

2007-01-01

Size:

7 pages

ISSN:

1738-494X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621

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