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InN thin-film growth using an ECR plasma source

Sato, Y. / Sato, S.

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InN thin-film growth using an ECR plasma source

Sato, Y. / Sato, S.

InN thin-film growth using an ECR plasma source

Sato, Y. / Sato, S.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

Similar titles

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Document information

Title:

InN thin-film growth using an ECR plasma source

Contributors:

Sato, Y. (author) / Sato, S. (author) / Henini, M. / Szweda, R.

Published in:

Low Dimensional Structures and Devices ; 171-175

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 35

Publication date:

1995-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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