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Substitutional Gettering of Platinum By Diffusion Into Ion-beam Damaged Silicon

Bonde Nielsen, K. / Holm, B.

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Substitutional Gettering of Platinum By Diffusion Into Ion-beam Damaged Silicon

Bonde Nielsen, K. / Holm, B.

Substitutional Gettering of Platinum By Diffusion Into Ion-beam Damaged Silicon

Bonde Nielsen, K. / Holm, B.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Substitutional Gettering of Platinum By Diffusion Into Ion-beam Damaged Silicon

Contributors:

Bonde Nielsen, K. (author) / Holm, B. (author)

Published in:

MATERIALS SCIENCE FORUM ; 1985-1990

Publication date:

1995-01-01

Size:

6 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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