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Proximity gettering of platinum in silicon following implantation with alpha particles at low doses

Schmidt, D.C. / Barbot, J.F. / Blanchard, C. / Godey, S. / Ntsoenzok, E. / Svensson, B.G.

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Proximity gettering of platinum in silicon following implantation with alpha particles at low doses

Schmidt, D.C. / Barbot, J.F. / Blanchard, C. / Godey, S. / Ntsoenzok, E. / Svensson, B.G.

Proximity gettering of platinum in silicon following implantation with alpha particles at low doses

Schmidt, D.C. / Barbot, J.F. / Blanchard, C. / Godey, S. / Ntsoenzok, E. / Svensson, B.G.

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Document information

Title:

Proximity gettering of platinum in silicon following implantation with alpha particles at low doses

Contributors:

Schmidt, D.C. (author) / Barbot, J.F. (author) / Blanchard, C. (author) / Godey, S. (author) / Ntsoenzok, E. (author) / Svensson, B.G. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 71 ; 182 - 185

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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