Diffusion, solubility and gettering of copper in silicon: Fid-Bau Portal

Diffusion, solubility and gettering of copper in silicon

Istratov, A. A. / Flink, C. / Hieslmair, H. / McHugo, S. A. / Weber, E. R.

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Diffusion, solubility and gettering of copper in silicon

Istratov, A. A. / Flink, C. / Hieslmair, H. / McHugo, S. A. / Weber, E. R.

Diffusion, solubility and gettering of copper in silicon

Istratov, A. A. / Flink, C. / Hieslmair, H. / McHugo, S. A. / Weber, E. R.

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Title:

Diffusion, solubility and gettering of copper in silicon

Contributors:

Istratov, A. A. (author) / Flink, C. (author) / Hieslmair, H. (author) / McHugo, S. A. (author) / Weber, E. R. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 72 ; 99 - 104

Publication date:

2000-01-01

Size:

6 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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