Study on the electron cyclotron resonance plasma chemical vapor deposition of carbon nanotubes

Wang, Z. / Ba, D. / Cao, P. et al. | British Library Online Contents | 2007

Effect of deposition pressure on bonding nature in hydrogenated amorphous carbon films processed by electron cyclotron resonance plasma enhanced chemical vapor deposition

Ryu, H.J. / Kim, S.H. / Hong, S.H. | British Library Online Contents | 2000

Physical properties of a-C:H films prepared by electron cyclotron resonance microwave plasma chemical vapor deposition

Zhou, X. T. / Lee, S. T. / Bello, I. et al. | British Library Online Contents | 2000

Preparation and characterization of ZrF~4-BaF~2-EuF~3 planar glass films by electron cyclotron resonance plasma-enhanced chemical vapor deposition

Kawamoto, Y. / Kanno, R. / Konishi, A. | British Library Online Contents | 1998

Plasma enhanced chemical vapour deposition of SiO"xN"y in an integrated distributed electron cyclotron resonance reactor

Hofrichter, A. / Bulkin, P. / Drevillon, B. | British Library Online Contents | 1999