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Etherogeneous precipitation in oxygen-implanted silicon

Cerofolini, G. F. / Bertoni, S. / Meda, L. / Spaggiari, C.

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Etherogeneous precipitation in oxygen-implanted silicon

Cerofolini, G. F. / Bertoni, S. / Meda, L. / Spaggiari, C.

Etherogeneous precipitation in oxygen-implanted silicon

Cerofolini, G. F. / Bertoni, S. / Meda, L. / Spaggiari, C.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Etherogeneous precipitation in oxygen-implanted silicon

Contributors:

Cerofolini, G. F. (author) / Bertoni, S. (author) / Meda, L. (author) / Spaggiari, C. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 36 ; 26-29

Publication date:

1996-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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