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Out-diffusion of hydrogen from hydrogen plasma-processed oxygen-implanted silicon

Misiuk, A. / Bak-Misiuk, J. / Barcz, A. / Romanowski, P. / Tyschenko, I. / Ulyashin, A. / Prujszczyk, M.

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Out-diffusion of hydrogen from hydrogen plasma-processed oxygen-implanted silicon

Misiuk, A. / Bak-Misiuk, J. / Barcz, A. / Romanowski, P. / Tyschenko, I. / Ulyashin, A. / Prujszczyk, M.

Out-diffusion of hydrogen from hydrogen plasma-processed oxygen-implanted silicon

Misiuk, A. / Bak-Misiuk, J. / Barcz, A. / Romanowski, P. / Tyschenko, I. / Ulyashin, A. / Prujszczyk, M.

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Document information

Title:

Out-diffusion of hydrogen from hydrogen plasma-processed oxygen-implanted silicon

Contributors:

Misiuk, A. (author) / Bak-Misiuk, J. (author) / Barcz, A. (author) / Romanowski, P. (author) / Tyschenko, I. (author) / Ulyashin, A. (author) / Prujszczyk, M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 260 ; 54-58

Publication date:

2012-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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