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    Characterization of surface microroughness of silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer

    New search for: Taijing, L.
    New search for: Ng, S. C.
    New search for: Furukawa, J.
    New search for: Furuya, H.

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    Characterization of surface microroughness of silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer

    New search for: Taijing, L.
    New search for: Ng, S. C.
    New search for: Furukawa, J.
    New search for: Furuya, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Characterization of surface microroughness of silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer

    New search for: Taijing, L.
    New search for: Ng, S. C.
    New search for: Furukawa, J.
    New search for: Furuya, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Characterization of surface microroughness of silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer

    Contributors:

    Taijing, L. (author) / Ng, S. C. (author) / Furukawa, J. (author) / Furuya, H. (author)

    Published in:

    JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 11 ; 878-883

    Publication date:

    1996-01-01

    Size:

    6 pages

    ISSN:

    0884-2914

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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