XPS studies on SiC thin layers formed by ion implantation with a metal vapor vacuum arc ion source: Fid-Bau Portal

XPS studies on SiC thin layers formed by ion implantation with a metal vapor vacuum arc ion source

Yan, H. / Kwok, R. W. M. / Wong, S. P.

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XPS studies on SiC thin layers formed by ion implantation with a metal vapor vacuum arc ion source

Yan, H. / Kwok, R. W. M. / Wong, S. P.

XPS studies on SiC thin layers formed by ion implantation with a metal vapor vacuum arc ion source

Yan, H. / Kwok, R. W. M. / Wong, S. P.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

XPS studies on SiC thin layers formed by ion implantation with a metal vapor vacuum arc ion source

Contributors:

Yan, H. (author) / Kwok, R. W. M. (author) / Wong, S. P. (author)

Published in:

APPLIED SURFACE SCIENCE ; 92 ; 61-65

Publication date:

1996-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Li, C. P. / Wang, N. / Wong, S. P. et al. | British Library Online Contents | 2002

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Wei, M. / Kun, T. / Xingtao, L. et al. | British Library Online Contents | 2001

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Rong, C. / Zhang, J. / Li, W. | British Library Online Contents | 2003