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Low-temperature, direct synthesis of b-SiC by metal vapor vacuum arc ion source implantation

Liu, Z. Q. / Liu, J. F. / Feng, J. Y. / Li, W. Z.

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Low-temperature, direct synthesis of b-SiC by metal vapor vacuum arc ion source implantation

Liu, Z. Q. / Liu, J. F. / Feng, J. Y. / Li, W. Z.

Low-temperature, direct synthesis of b-SiC by metal vapor vacuum arc ion source implantation

Liu, Z. Q. / Liu, J. F. / Feng, J. Y. / Li, W. Z.

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Low-temperature, direct synthesis of b-SiC by metal vapor vacuum arc ion source implantation

Contributors:

Liu, Z. Q. (author) / Liu, J. F. (author) / Feng, J. Y. (author) / Li, W. Z. (author)

Published in:

MATERIALS LETTERS ; 50 ; 275-278

Publication date:

2001-01-01

Size:

4 pages

ISSN:

0167-577X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1105 / 530

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