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Studies of silicon-nitride (Si~3N~4) using laser ablation mass spectrometry

Wang, S. L. / Ledingham, K. W. D. / Jia, W. J. / Singhal, R. P.

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Studies of silicon-nitride (Si~3N~4) using laser ablation mass spectrometry

Wang, S. L. / Ledingham, K. W. D. / Jia, W. J. / Singhal, R. P.

Studies of silicon-nitride (Si~3N~4) using laser ablation mass spectrometry

Wang, S. L. / Ledingham, K. W. D. / Jia, W. J. / Singhal, R. P.

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Check availability in my library

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Document information

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Document information

Title:

Studies of silicon-nitride (Si~3N~4) using laser ablation mass spectrometry

Contributors:

Wang, S. L. (author) / Ledingham, K. W. D. (author) / Jia, W. J. (author) / Singhal, R. P. (author)

Published in:

APPLIED SURFACE SCIENCE ; 93 ; 205-210

Publication date:

1996-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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