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Generation of cavities in silicon wafers by laser ablation using silicon nitride as sacrificial layer

Lerner, B. / Perez, M. S. / Toro, C. / Lasorsa, C. / Rinaldi, C. A. / Boselli, A. / Lamagna, A.

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Generation of cavities in silicon wafers by laser ablation using silicon nitride as sacrificial layer

Lerner, B. / Perez, M. S. / Toro, C. / Lasorsa, C. / Rinaldi, C. A. / Boselli, A. / Lamagna, A.

Generation of cavities in silicon wafers by laser ablation using silicon nitride as sacrificial layer

Lerner, B. / Perez, M. S. / Toro, C. / Lasorsa, C. / Rinaldi, C. A. / Boselli, A. / Lamagna, A.

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Document information

Title:

Generation of cavities in silicon wafers by laser ablation using silicon nitride as sacrificial layer

Contributors:

Lerner, B. (author) / Perez, M. S. (author) / Toro, C. (author) / Lasorsa, C. (author) / Rinaldi, C. A. (author) / Boselli, A. (author) / Lamagna, A. (author)

Published in:

APPLIED SURFACE SCIENCE ; 258 ; 2914-2919

Publication date:

2012-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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