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Gas-phase room-temperature oxidation of (100) silicon

Cerofolini, G. F. / La Bruna, G. / Meda, L.

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Gas-phase room-temperature oxidation of (100) silicon

Cerofolini, G. F. / La Bruna, G. / Meda, L.

Gas-phase room-temperature oxidation of (100) silicon

Cerofolini, G. F. / La Bruna, G. / Meda, L.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Gas-phase room-temperature oxidation of (100) silicon

Contributors:

Cerofolini, G. F. (author) / La Bruna, G. (author) / Meda, L. (author)

Published in:

APPLIED SURFACE SCIENCE ; 93 ; 255-266

Publication date:

1996-01-01

Size:

12 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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