A platform for research: civil engineering, architecture and urbanism
Fabrication of ultrathin silicon dioxide layers in room temperature by ultrahigh vacuum plasma oxidation
Fabrication of ultrathin silicon dioxide layers in room temperature by ultrahigh vacuum plasma oxidation
Fabrication of ultrathin silicon dioxide layers in room temperature by ultrahigh vacuum plasma oxidation
Majamaa, T. (author) / Kilpelae, O. (author) / Novikov, S. (author)
APPLIED SURFACE SCIENCE ; 136 ; 17-21
1998-01-01
5 pages
Article (Journal)
English
DDC:
621.35
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Annealing of ultrathin silicon dioxide layers plasma oxidized in ultrahigh vacuum
British Library Online Contents | 1999
|Fabrication of ultrathin silicon dioxide layers in ultra high vacuum
British Library Online Contents | 1996
|Room-temperature oxidation of ultrathin TiB~2 films
British Library Online Contents | 2002
|Ultrathin Au layers on Si(100): surface silicide formation at room temperature
British Library Online Contents | 1998
|British Library Online Contents | 2013
|