Pulsed laser deposition of silicon nitride thin films by laser ablation of a Si target in low pressure ammonia: Fid-Bau Portal

Pulsed laser deposition of silicon nitride thin films by laser ablation of a Si target in low pressure ammonia

Mihailescu, I. N. / Lita, A. / Teodorescu, V. S. / Luches, A. / Martino, M. / Perrone, A. / Gartner, M.

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Pulsed laser deposition of silicon nitride thin films by laser ablation of a Si target in low pressure ammonia

Mihailescu, I. N. / Lita, A. / Teodorescu, V. S. / Luches, A. / Martino, M. / Perrone, A. / Gartner, M.

Pulsed laser deposition of silicon nitride thin films by laser ablation of a Si target in low pressure ammonia

Mihailescu, I. N. / Lita, A. / Teodorescu, V. S. / Luches, A. / Martino, M. / Perrone, A. / Gartner, M.

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Document information

Title:

Pulsed laser deposition of silicon nitride thin films by laser ablation of a Si target in low pressure ammonia

Contributors:

Mihailescu, I. N. (author) / Lita, A. (author) / Teodorescu, V. S. (author) / Luches, A. (author) / Martino, M. (author) / Perrone, A. (author) / Gartner, M. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE ; 31 ; 2839-2847

Publication date:

1996-01-01

Size:

9 pages

ISSN:

0022-2461

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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