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Laser reactive ablation deposition of silicon carbide films
Laser reactive ablation deposition of silicon carbide films
Laser reactive ablation deposition of silicon carbide films
Leggieri, G. (author) / Luches, A. (author) / Martino, M. (author) / Perrone, A. (author) / Alexandrescu, R. (author) / Barborica, A. (author) / Gyorgy, E. (author) / Mihailescu, I. N. (author) / Majni, G. (author) / Mengucci, P. (author)
APPLIED SURFACE SCIENCE ; 96/98 ; 866-869
1996-01-01
4 pages
Article (Journal)
English
DDC:
621.35
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