Effect of additional gas on diamond deposition by DC PACVD: Fid-Bau Portal

Effect of additional gas on diamond deposition by DC PACVD

Lee, J.-K. / Baik, Y.-J. / Kwang Yong Eun

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Effect of additional gas on diamond deposition by DC PACVD

Lee, J.-K. / Baik, Y.-J. / Kwang Yong Eun

Effect of additional gas on diamond deposition by DC PACVD

Lee, J.-K. / Baik, Y.-J. / Kwang Yong Eun

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Effect of additional gas on diamond deposition by DC PACVD

Contributors:

Lee, J.-K. (author) / Baik, Y.-J. (author) / Kwang Yong Eun (author) / Sarin, V. K.

Published in:

Proceedings of the 5th International Conference on the Science of Hard Materials ; 399-404

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- A ; 209

Publication date:

1996-01-01

Size:

6 pages

ISSN:

0921-5093

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Humbert, B. / Hellala, N. / Ehrhardt, J. J. et al. | British Library Online Contents | 2008

Characterization and tribological evaluation of MW-PACVD diamond coatings deposited on pure titanium

Fu, Y. / Yan, B. / Loh, N. L. et al. | British Library Online Contents | 2000

Plasma sensor measurement in pulsed PACVD-Plasmas

Kluemper-Westkamp, H. / Mehner, A. / Hoffmann, F. et al. | British Library Online Contents | 1998

Deposition Temperature Effect on the Structure and Optical Property of RF-PACVD-Derived Hydrogenated SiCNO Film

Zhou, Y. / Yan, X. / Kroke, E. et al. | British Library Online Contents | 2006

Deposition of hard coatings type (B, C, N) at low coating temperatures by PACVD

Rie, K.-T. / Gebauer, A. / Woehle, J. et al. | British Library Online Contents | 1994