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    Deposition Temperature Effect on the Structure and Optical Property of RF-PACVD-Derived Hydrogenated SiCNO Film

    New search for: Zhou, Y.
    New search for: Yan, X.
    New search for: Kroke, E.
    New search for: Riedel, R.
    New search for: Probst, D.
    New search for: Thissen, A.
    New search for: Hauser, R.
    New search for: Ahles, M.
    New search for: von Seggern, H.

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    Deposition Temperature Effect on the Structure and Optical Property of RF-PACVD-Derived Hydrogenated SiCNO Film

    New search for: Zhou, Y.
    New search for: Yan, X.
    New search for: Kroke, E.
    New search for: Riedel, R.
    New search for: Probst, D.
    New search for: Thissen, A.
    New search for: Hauser, R.
    New search for: Ahles, M.
    New search for: von Seggern, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Deposition Temperature Effect on the Structure and Optical Property of RF-PACVD-Derived Hydrogenated SiCNO Film

    New search for: Zhou, Y.
    New search for: Yan, X.
    New search for: Kroke, E.
    New search for: Riedel, R.
    New search for: Probst, D.
    New search for: Thissen, A.
    New search for: Hauser, R.
    New search for: Ahles, M.
    New search for: von Seggern, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Deposition Temperature Effect on the Structure and Optical Property of RF-PACVD-Derived Hydrogenated SiCNO Film

    Contributors:

    Zhou, Y. (author) / Yan, X. (author) / Kroke, E. (author) / Riedel, R. (author) / Probst, D. (author) / Thissen, A. (author) / Hauser, R. (author) / Ahles, M. (author) / von Seggern, H. (author)

    Published in:

    MATERIALWISSENSCHAFT UND WERKSTOFFTECHNIK ; 37 ; 173-177

    Publication date:

    2006-01-01

    Size:

    5 pages

    ISSN:

    0933-5137

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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