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    Plasma sensor measurement in pulsed PACVD-Plasmas

    New search for: Kluemper-Westkamp, H.
    New search for: Mehner, A.
    New search for: Hoffmann, F.
    New search for: Mayr, P.

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    Plasma sensor measurement in pulsed PACVD-Plasmas

    New search for: Kluemper-Westkamp, H.
    New search for: Mehner, A.
    New search for: Hoffmann, F.
    New search for: Mayr, P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Plasma sensor measurement in pulsed PACVD-Plasmas

    New search for: Kluemper-Westkamp, H.
    New search for: Mehner, A.
    New search for: Hoffmann, F.
    New search for: Mayr, P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
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    Document information
    Title:

    Plasma sensor measurement in pulsed PACVD-Plasmas

    Contributors:

    Kluemper-Westkamp, H. (author) / Mehner, A. (author) / Hoffmann, F. (author) / Mayr, P. (author)

    Published in:

    MATERIALWISSENSCHAFT UND WERKSTOFFTECHNIK ; 29 ; 459-465

    Publication date:

    1998-01-01

    Size:

    7 pages

    ISSN:

    0933-5137

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    German

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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