Effect of SiO~2 Cap Layer on Thermal Stability of Nickel and Nickel-Cobalt Silicide: Fid-Bau Portal

Effect of SiO~2 Cap Layer on Thermal Stability of Nickel and Nickel-Cobalt Silicide

Han, K. J. / Cho, Y. J. / Oh, S. Y. / Kim, Y. J. / Lee, W. J. / Lee, H. D. / Kim, Y. C.

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Effect of SiO~2 Cap Layer on Thermal Stability of Nickel and Nickel-Cobalt Silicide

Han, K. J. / Cho, Y. J. / Oh, S. Y. / Kim, Y. J. / Lee, W. J. / Lee, H. D. / Kim, Y. C.

Effect of SiO~2 Cap Layer on Thermal Stability of Nickel and Nickel-Cobalt Silicide

Han, K. J. / Cho, Y. J. / Oh, S. Y. / Kim, Y. J. / Lee, W. J. / Lee, H. D. / Kim, Y. C.

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Title:

Effect of SiO~2 Cap Layer on Thermal Stability of Nickel and Nickel-Cobalt Silicide

Contributors:

Han, K. J. (author) / Cho, Y. J. (author) / Oh, S. Y. (author) / Kim, Y. J. (author) / Lee, W. J. (author) / Lee, H. D. (author) / Kim, Y. C. (author) / Lee, S.-S. / Lee, J. H. / Park, I. K.

Published in:

Advanced Nondestructive Evaluation I ; 1322-1325

KEY ENGINEERING MATERIALS ; 321/323

Publication date:

2006-01-01

Size:

4 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Poon, M. C. / Deng, F. / Chan, M. et al. | British Library Online Contents | 2000

Effect of pre-treatment and nickel layer thickness on nickel silicide/silicon carbide contact

Cao, Y. / Nyborg, L. / Jelvestam, U. et al. | British Library Online Contents | 2005

Thermal stability of nickel silicide on silicon on insulator (SOI) material

Cafra, B. / Alberti, A. / Ottaviano, L. et al. | British Library Online Contents | 2004

XPS and HRTEM characterization of cobalt-nickel silicide thin films

Garcendez, M. / Castillon, F. F. / Hirata, G. A. et al. | British Library Online Contents | 2000

Microstructural characterization of ordered nickel silicide structures grown on (111) nickel silicide films

Ho, H. L. / Bauer, C. L. / Mahajan, S. et al. | British Library Online Contents | 1996