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Growth rate modeling for selective tungsten LPCVD

Wolf, H. / Streiter, R. / Schulz, S. E. / Gessner, T.

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Growth rate modeling for selective tungsten LPCVD

Wolf, H. / Streiter, R. / Schulz, S. E. / Gessner, T.

Growth rate modeling for selective tungsten LPCVD

Wolf, H. / Streiter, R. / Schulz, S. E. / Gessner, T.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Growth rate modeling for selective tungsten LPCVD

Contributors:

Wolf, H. (author) / Streiter, R. (author) / Schulz, S. E. (author) / Gessner, T. (author) / Gessner, T. / Schulz, S. E.

Published in:

Materials for Advanced Metallization ; 332-338

APPLIED SURFACE SCIENCE ; 91

Publication date:

1996-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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