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    High-rate deposition of high-quality Cu film with LPCVD

    New search for: Numajiri, K.
    New search for: Goya, T.
    New search for: Tobe, R.
    New search for: Okada, O.
    New search for: Hosokawa, N.
    New search for: Mu, C.
    New search for: Cox, N.
    New search for: Scott, C.
    New search for: Yu, J.
    New search for: Feldman, L. C.
    New search for: Nishizawa, J.
    New search for: Van der Weg, W. F.

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    High-rate deposition of high-quality Cu film with LPCVD

    New search for: Numajiri, K.
    New search for: Goya, T.
    New search for: Tobe, R.
    New search for: Okada, O.
    New search for: Hosokawa, N.
    New search for: Mu, C.
    New search for: Cox, N.
    New search for: Scott, C.
    New search for: Yu, J.
    New search for: Feldman, L. C.
    New search for: Nishizawa, J.
    New search for: Van der Weg, W. F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    High-rate deposition of high-quality Cu film with LPCVD

    New search for: Numajiri, K.
    New search for: Goya, T.
    New search for: Tobe, R.
    New search for: Okada, O.
    New search for: Hosokawa, N.
    New search for: Mu, C.
    New search for: Cox, N.
    New search for: Scott, C.
    New search for: Yu, J.
    New search for: Feldman, L. C.
    New search for: Nishizawa, J.
    New search for: Van der Weg, W. F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Title:

    High-rate deposition of high-quality Cu film with LPCVD

    Contributors:

    Numajiri, K. (author) / Goya, T. (author) / Tobe, R. (author) / Okada, O. (author) / Hosokawa, N. (author) / Mu, C. (author) / Cox, N. (author) / Scott, C. (author) / Yu, J. (author) / Feldman, L. C.

    Published in:

    A journal devoted to applied physics and chemistry of surfaces and interfaces ; 541-545

    APPLIED SURFACE SCIENCE ; 100/101

    Publication date:

    1996-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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