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    Advanced metallization technology for 256M DRAM

    New search for: Kuecher, P.
    New search for: Aochi, H.
    New search for: Gambino, J.
    New search for: Licata, T.
    New search for: Matsuda, T.
    New search for: Nguyen, S.
    New search for: Okazaki, M.
    New search for: Palm, H.
    New search for: Ronay, M.
    New search for: Gessner, T.
    New search for: Schulz, S. E.

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    Advanced metallization technology for 256M DRAM

    New search for: Kuecher, P.
    New search for: Aochi, H.
    New search for: Gambino, J.
    New search for: Licata, T.
    New search for: Matsuda, T.
    New search for: Nguyen, S.
    New search for: Okazaki, M.
    New search for: Palm, H.
    New search for: Ronay, M.
    New search for: Gessner, T.
    New search for: Schulz, S. E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Advanced metallization technology for 256M DRAM

    New search for: Kuecher, P.
    New search for: Aochi, H.
    New search for: Gambino, J.
    New search for: Licata, T.
    New search for: Matsuda, T.
    New search for: Nguyen, S.
    New search for: Okazaki, M.
    New search for: Palm, H.
    New search for: Ronay, M.
    New search for: Gessner, T.
    New search for: Schulz, S. E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
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    Document information
    Title:

    Advanced metallization technology for 256M DRAM

    Contributors:

    Kuecher, P. (author) / Aochi, H. (author) / Gambino, J. (author) / Licata, T. (author) / Matsuda, T. (author) / Nguyen, S. (author) / Okazaki, M. (author) / Palm, H. (author) / Ronay, M. (author) / Gessner, T.

    Published in:

    Materials for Advanced Metallization ; 359-366

    APPLIED SURFACE SCIENCE ; 91

    Publication date:

    1996-01-01

    Size:

    8 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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