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Conversion process of chlorine containing polysilanes into silicon carbide. Part II Crystallization of the inorganic amorphous silicon carbide derived from chlorine containing polysilane
Conversion process of chlorine containing polysilanes into silicon carbide. Part II Crystallization of the inorganic amorphous silicon carbide derived from chlorine containing polysilane
Conversion process of chlorine containing polysilanes into silicon carbide. Part II Crystallization of the inorganic amorphous silicon carbide derived from chlorine containing polysilane
Martin, H. P. (author) / Mueller, E. (author) / Brendler, E. (author)
JOURNAL OF MATERIALS SCIENCE ; 31 ; 4363-4368
1996-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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