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Etching process of silicon carbide from polysiloxane by chlorine
Etching process of silicon carbide from polysiloxane by chlorine
Etching process of silicon carbide from polysiloxane by chlorine
Duan, Liqun (author) / Ma, Qingsong (author) / Chen, Zhaohui (author)
Corrosion science ; 87 ; 127-133
2014-01-01
7 pages
Article (Journal)
English
DDC:
620.11223
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