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    Shadowed Sputtering of Gold on V-Shaped Microtrenches Etched in Silicon and Applications in Microfabrication

    New search for: Xia, Y.
    New search for: Whitesides, G. M.

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    Shadowed Sputtering of Gold on V-Shaped Microtrenches Etched in Silicon and Applications in Microfabrication

    New search for: Xia, Y.
    New search for: Whitesides, G. M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Shadowed Sputtering of Gold on V-Shaped Microtrenches Etched in Silicon and Applications in Microfabrication

    New search for: Xia, Y.
    New search for: Whitesides, G. M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
    Title:

    Shadowed Sputtering of Gold on V-Shaped Microtrenches Etched in Silicon and Applications in Microfabrication

    Contributors:

    Xia, Y. (author) / Whitesides, G. M. (author)

    Published in:

    ADVANCED MATERIALS -DEERFIELD BEACH- ; 8 ; 765-768

    Publication date:

    1996-01-01

    Size:

    4 pages

    ISSN:

    0935-9648

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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