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    Microfabrication: LIGA-X and applications

    New search for: Kupka, R. K.
    New search for: Bouamrane, F.
    New search for: Cremers, C.
    New search for: Megtert, S.

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    Microfabrication: LIGA-X and applications

    New search for: Kupka, R. K.
    New search for: Bouamrane, F.
    New search for: Cremers, C.
    New search for: Megtert, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Microfabrication: LIGA-X and applications

    New search for: Kupka, R. K.
    New search for: Bouamrane, F.
    New search for: Cremers, C.
    New search for: Megtert, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Microfabrication: LIGA-X and applications

    Contributors:

    Kupka, R. K. (author) / Bouamrane, F. (author) / Cremers, C. (author) / Megtert, S. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 164 ; 97-110

    Publication date:

    2000-01-01

    Size:

    14 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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