Oxidation of thin erbium and erbium silicide overlayers in contact with silicon oxide films thermally grown on silicon: Fid-Bau Portal

Oxidation of thin erbium and erbium silicide overlayers in contact with silicon oxide films thermally grown on silicon

Kennou, S. / Ladas, S. / Grimaldi, M. G. / Nyugen Tan, T. A. / Veuillen, J. Y.

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Oxidation of thin erbium and erbium silicide overlayers in contact with silicon oxide films thermally grown on silicon

Kennou, S. / Ladas, S. / Grimaldi, M. G. / Nyugen Tan, T. A. / Veuillen, J. Y.

Oxidation of thin erbium and erbium silicide overlayers in contact with silicon oxide films thermally grown on silicon

Kennou, S. / Ladas, S. / Grimaldi, M. G. / Nyugen Tan, T. A. / Veuillen, J. Y.

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Document information

Title:

Oxidation of thin erbium and erbium silicide overlayers in contact with silicon oxide films thermally grown on silicon

Contributors:

Kennou, S. (author) / Ladas, S. (author) / Grimaldi, M. G. (author) / Nyugen Tan, T. A. (author) / Veuillen, J. Y. (author)

Published in:

APPLIED SURFACE SCIENCE ; 102 ; 142-146

Publication date:

1996-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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