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Atomic force microscopy study on the surface structure of oxidized porous silicon

Young, T. F. / Huang, I. W. / Yang, Y. L. / Kuo, W. C. / Jiang, I. M. / Chang, T. C. / Chang, C. Y.

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Atomic force microscopy study on the surface structure of oxidized porous silicon

Young, T. F. / Huang, I. W. / Yang, Y. L. / Kuo, W. C. / Jiang, I. M. / Chang, T. C. / Chang, C. Y.

Atomic force microscopy study on the surface structure of oxidized porous silicon

Young, T. F. / Huang, I. W. / Yang, Y. L. / Kuo, W. C. / Jiang, I. M. / Chang, T. C. / Chang, C. Y.

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Document information

Title:

Atomic force microscopy study on the surface structure of oxidized porous silicon

Contributors:

Young, T. F. (author) / Huang, I. W. (author) / Yang, Y. L. (author) / Kuo, W. C. (author) / Jiang, I. M. (author) / Chang, T. C. (author) / Chang, C. Y. (author)

Published in:

APPLIED SURFACE SCIENCE ; 102 ; 404-407

Publication date:

1996-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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