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    A nondestructive analysis technique for residual thin films in deep-submicron contact holes

    New search for: Ninomiya, K.
    New search for: Kure, T.
    New search for: Sudo, Y.
    New search for: Kuroda, K.
    New search for: Todokoro, H.
    New search for: Feldman, L. C.
    New search for: Nishizawa, J.
    New search for: Van der Weg, W. F.

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    A nondestructive analysis technique for residual thin films in deep-submicron contact holes

    New search for: Ninomiya, K.
    New search for: Kure, T.
    New search for: Sudo, Y.
    New search for: Kuroda, K.
    New search for: Todokoro, H.
    New search for: Feldman, L. C.
    New search for: Nishizawa, J.
    New search for: Van der Weg, W. F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    A nondestructive analysis technique for residual thin films in deep-submicron contact holes

    New search for: Ninomiya, K.
    New search for: Kure, T.
    New search for: Sudo, Y.
    New search for: Kuroda, K.
    New search for: Todokoro, H.
    New search for: Feldman, L. C.
    New search for: Nishizawa, J.
    New search for: Van der Weg, W. F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    A nondestructive analysis technique for residual thin films in deep-submicron contact holes

    Contributors:

    Ninomiya, K. (author) / Kure, T. (author) / Sudo, Y. (author) / Kuroda, K. (author) / Todokoro, H. (author) / Feldman, L. C. / Nishizawa, J. / Van der Weg, W. F.

    Published in:

    A journal devoted to applied physics and chemistry of surfaces and interfaces ; 551-555

    APPLIED SURFACE SCIENCE ; 100/101

    Publication date:

    1996-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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