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Studies on low temperature silicon grain growth on SiO~2 by electron cyclotron resonance chemical vapor deposition

Wang, K. C. / Hwang, H. L. / Loferski, J. J. / Yew, T. R.

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Studies on low temperature silicon grain growth on SiO~2 by electron cyclotron resonance chemical vapor deposition

Wang, K. C. / Hwang, H. L. / Loferski, J. J. / Yew, T. R.

Studies on low temperature silicon grain growth on SiO~2 by electron cyclotron resonance chemical vapor deposition

Wang, K. C. / Hwang, H. L. / Loferski, J. J. / Yew, T. R.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Studies on low temperature silicon grain growth on SiO~2 by electron cyclotron resonance chemical vapor deposition

Contributors:

Wang, K. C. (author) / Hwang, H. L. (author) / Loferski, J. J. (author) / Yew, T. R. (author)

Published in:

APPLIED SURFACE SCIENCE ; 104/105 ; 373-378

Publication date:

1996-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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