A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
SiON large area deposition with a deep-UV flash argon/krypton lamp array
SiON large area deposition with a deep-UV flash argon/krypton lamp array
SiON large area deposition with a deep-UV flash argon/krypton lamp array
Flicstein, J. (author) / Mba, J. (author) / Lescaut, B. (author) / Vitel, Y. (author) / Ossart, P. (author) / Licoppe, C. (author)
APPLIED SURFACE SCIENCE ; 106 ; 44-50
1996-01-01
7 pages
Article (Journal)
English
DDC:
621.35
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