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    Intermixing in immiscible molybdenum/copper multilayered metallization under excimer laser irradiation

    New search for: Luby, S.
    New search for: Majkova, E.
    New search for: Jergel, M.
    New search for: D'Anna, E.
    New search for: Leggieri, G.
    New search for: Luches, A.
    New search for: Martino, M.
    New search for: Valicek, J.

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    Intermixing in immiscible molybdenum/copper multilayered metallization under excimer laser irradiation

    New search for: Luby, S.
    New search for: Majkova, E.
    New search for: Jergel, M.
    New search for: D'Anna, E.
    New search for: Leggieri, G.
    New search for: Luches, A.
    New search for: Martino, M.
    New search for: Valicek, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Intermixing in immiscible molybdenum/copper multilayered metallization under excimer laser irradiation

    New search for: Luby, S.
    New search for: Majkova, E.
    New search for: Jergel, M.
    New search for: D'Anna, E.
    New search for: Leggieri, G.
    New search for: Luches, A.
    New search for: Martino, M.
    New search for: Valicek, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Intermixing in immiscible molybdenum/copper multilayered metallization under excimer laser irradiation

    Contributors:

    Luby, S. (author) / Majkova, E. (author) / Jergel, M. (author) / D'Anna, E. (author) / Leggieri, G. (author) / Luches, A. (author) / Martino, M. (author) / Valicek, J. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 106 ; 243-246

    Publication date:

    1996-01-01

    Size:

    4 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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