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Excimer laser machining and metallization of vias in aluminium nitride

Lumpp, J. K.

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Excimer laser machining and metallization of vias in aluminium nitride

Lumpp, J. K.

Excimer laser machining and metallization of vias in aluminium nitride

Lumpp, J. K.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Excimer laser machining and metallization of vias in aluminium nitride

Contributors:

Lumpp, J. K. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 45 ; 208-212

Publication date:

1997-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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