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Deposition of nanocrystalline metal films by cluster beams produced by a Pulsed Arc Cluster Ion Source
Deposition of nanocrystalline metal films by cluster beams produced by a Pulsed Arc Cluster Ion Source
Deposition of nanocrystalline metal films by cluster beams produced by a Pulsed Arc Cluster Ion Source
Barborini, E. ( author ) / Piseri, P. ( author ) / Milani, P. ( author ) / Iannotta, S. ( author )
MATERIALS SCIENCE FORUM ; 267-272
1997-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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