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Implantation and Dry Etching of Group-III-Nitride Semiconductors

Zolper, J. C. / Shul, R. J.

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Implantation and Dry Etching of Group-III-Nitride Semiconductors

Zolper, J. C. / Shul, R. J.

Implantation and Dry Etching of Group-III-Nitride Semiconductors

Zolper, J. C. / Shul, R. J.

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Check availability in my library

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Title:

Implantation and Dry Etching of Group-III-Nitride Semiconductors

Contributors:

Zolper, J. C. (author) / Shul, R. J. (author)

Published in:

MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 22 ; 36-43

Publication date:

1997-01-01

Size:

8 pages

ISSN:

0883-7694

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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