Ion implantation of semiconductors: Fid-Bau Portal

Ion implantation of semiconductors

Williams, J. S.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Ion implantation of semiconductors

Williams, J. S.

Ion implantation of semiconductors

Williams, J. S.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Ion implantation of semiconductors

Contributors:

Williams, J. S. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- A ; 253 ; 8-15

Publication date:

1998-01-01

Size:

8 pages

ISSN:

0921-5093

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

K. Hohmuth | NTIS | 1978

Implantation and Dry Etching of Group-III-Nitride Semiconductors

Zolper, J. C. / Shul, R. J. | British Library Online Contents | 1997

Hydrogen Implantation in III-V Compound Semiconductors and its Redistribution with Annealing

Zavada, J. M. / Wilson, R. G. | British Library Online Contents | 1994

Macrodefect formation in semiconductors during high energy ion implantation: Monte Carlo simulation of damage depth distributions

Fedotov, S. A. / Varichenko, V. S. / Zaitsev, A. M. et al. | British Library Online Contents | 1995

Synthesis of metastable group-IV alloy semiconductors by ion implantation and ion-beam-induced epitaxial crystallization

Kobayashi, N. / Hasegawa, M. / Hayashi, N. et al. | British Library Online Contents | 1996