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Excimer-laser patterning of copper in LDE (laser dry etching)

Pfleging, W. / Voerckel, A. / Duddek, H. / Wesner, D. A. / Kreutz, E. W.

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Excimer-laser patterning of copper in LDE (laser dry etching)

Pfleging, W. / Voerckel, A. / Duddek, H. / Wesner, D. A. / Kreutz, E. W.

Excimer-laser patterning of copper in LDE (laser dry etching)

Pfleging, W. / Voerckel, A. / Duddek, H. / Wesner, D. A. / Kreutz, E. W.

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Document information

Title:

Excimer-laser patterning of copper in LDE (laser dry etching)

Contributors:

Pfleging, W. (author) / Voerckel, A. (author) / Duddek, H. (author) / Wesner, D. A. (author) / Kreutz, E. W. (author)

Published in:

APPLIED SURFACE SCIENCE ; 109/110 ; 194-200

Publication date:

1997-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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