A platform for research: civil engineering, architecture and urbanism
Excimer-laser induced chemical etching of transition metals
Excimer-laser induced chemical etching of transition metals
Excimer-laser induced chemical etching of transition metals
O`Driscoll, C. (author) / Winfield, R. (author) / Khalfi, K. (author) / Kelly, P. V. (author) / Crean, G. M. (author)
APPLIED SURFACE SCIENCE ; 168 ; 320-323
2000-01-01
4 pages
Article (Journal)
English
DDC:
621.35
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Technical Note: Excimer laser–induced etching of semiconductors and metals
British Library Online Contents | 1990
|British Library Online Contents | 2008
|Excimer laser induced chlorine etching of Si patterns for microelectronics
British Library Online Contents | 1996
|Laser-induced front side etching of CaF2 crystals with KrF excimer laser
British Library Online Contents | 2013
|Excimer-laser patterning of copper in LDE (laser dry etching)
British Library Online Contents | 1997
|