A platform for research: civil engineering, architecture and urbanism
Low biased voltage induced textured growth of LiNbO~3 films on silicon wafer
Low biased voltage induced textured growth of LiNbO~3 films on silicon wafer
Low biased voltage induced textured growth of LiNbO~3 films on silicon wafer
Liu, Z. G. (author) / Hu, W. S. (author) / Guo, X. L. (author) / Liu, J. M. (author) / Feng, D. (author)
APPLIED SURFACE SCIENCE ; 109/110 ; 520-523
1997-01-01
4 pages
Article (Journal)
English
DDC:
621.35
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Pulsed laser deposition of (001) textured LiNbO~3 films on Al~2O~3/SiO~2/Si substrate
British Library Online Contents | 1999
|Oriented Growth of LiNbO~3 Thin Films for SAW Properties
British Library Online Contents | 2002
|Study on the Surface Quality of LiNbO~3 Wafer by CMP
British Library Online Contents | 2004
|Growth and evolution of residual stress of AlN films on silicon (100) wafer
British Library Online Contents | 2016
|British Library Online Contents | 2014
|