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    Study on the Surface Quality of LiNbO~3 Wafer by CMP

    New search for: Xing, T.
    New search for: Yuan, J. L.
    New search for: Li, W.
    New search for: Ji, S. M.
    New search for: Zhang, L. B.
    New search for: Zhao, W. H.
    New search for: Xu, X.

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    Study on the Surface Quality of LiNbO~3 Wafer by CMP

    New search for: Xing, T.
    New search for: Yuan, J. L.
    New search for: Li, W.
    New search for: Ji, S. M.
    New search for: Zhang, L. B.
    New search for: Zhao, W. H.
    New search for: Xu, X.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Study on the Surface Quality of LiNbO~3 Wafer by CMP

    New search for: Xing, T.
    New search for: Yuan, J. L.
    New search for: Li, W.
    New search for: Ji, S. M.
    New search for: Zhang, L. B.
    New search for: Zhao, W. H.
    New search for: Xu, X.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Study on the Surface Quality of LiNbO~3 Wafer by CMP

    Contributors:

    Xing, T. (author) / Yuan, J. L. (author) / Li, W. (author) / Ji, S. M. (author) / Zhang, L. B. (author) / Zhao, W. H. (author) / Xu, X.

    Published in:

    Advances in Grinding and Abrasive Processes ; 644-647

    KEY ENGINEERING MATERIALS

    Publication date:

    2004-01-01

    Size:

    4 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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