A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Growth and evolution of residual stress of AlN films on silicon (100) wafer
Growth and evolution of residual stress of AlN films on silicon (100) wafer
Growth and evolution of residual stress of AlN films on silicon (100) wafer
Pandey, Akhilesh (author) / Dutta, Shankar (author) / Prakash, Ravi (author) / Dalal, Sandeep (author) / Raman, R. (author) / Kapoor, Ashok Kumar (author) / Kaur, Davinder (author)
Materials science in semiconductor processing ; 52 ; 16-23
2016-01-01
8 pages
Article (Journal)
English
DDC:
621.38152
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Estimation of boron diffusion induced residual stress in silicon by wafer curvature technique
| British Library Online Contents | 2016
Residual stress analysis on silicon wafer surface layers induced by ultra-precision grinding
| British Library Online Contents | 2011
Estimation of boron diffusion induced residual stress in silicon by wafer curvature technique
| British Library Online Contents | 2016
| British Library Online Contents | 2006
Evolution of residual stress in benzocyclobutene films with temperature
| British Library Online Contents | 2015