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Hybrid plasma chemical vapour deposition of aluminium nitride from Al and NH~3/N~2 mixtures

Ahmed, W. / Tither, D.

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Hybrid plasma chemical vapour deposition of aluminium nitride from Al and NH~3/N~2 mixtures

Ahmed, W. / Tither, D.

Hybrid plasma chemical vapour deposition of aluminium nitride from Al and NH~3/N~2 mixtures

Ahmed, W. / Tither, D.

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Hybrid plasma chemical vapour deposition of aluminium nitride from Al and NH~3/N~2 mixtures

Contributors:

Ahmed, W. (author) / Tither, D. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE LETTERS ; 16 ; 412-415

Publication date:

1997-01-01

Size:

4 pages

ISSN:

0261-8028

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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