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Growth of aluminium nitride on porous silica by atomic layer chemical vapour deposition

Puurunen, R. L. / Root, A. / Sarv, P. / Haukka, S. / Iiskola, E. I. / Lindblad, M. / Krause, A. O.

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Growth of aluminium nitride on porous silica by atomic layer chemical vapour deposition

Puurunen, R. L. / Root, A. / Sarv, P. / Haukka, S. / Iiskola, E. I. / Lindblad, M. / Krause, A. O.

Growth of aluminium nitride on porous silica by atomic layer chemical vapour deposition

Puurunen, R. L. / Root, A. / Sarv, P. / Haukka, S. / Iiskola, E. I. / Lindblad, M. / Krause, A. O.

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Document information

Title:

Growth of aluminium nitride on porous silica by atomic layer chemical vapour deposition

Contributors:

Puurunen, R. L. (author) / Root, A. (author) / Sarv, P. (author) / Haukka, S. (author) / Iiskola, E. I. (author) / Lindblad, M. (author) / Krause, A. O. (author)

Published in:

APPLIED SURFACE SCIENCE ; 165 ; 193-202

Publication date:

2000-01-01

Size:

10 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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