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    Optical properties of excimer laser annealed polycrystalline Si by spectroscopic ellipsometry

    New search for: Yu, G.
    New search for: Soga, T.
    New search for: Shao, C. L.
    New search for: Jimbo, T.
    New search for: Umeno, M.

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    Optical properties of excimer laser annealed polycrystalline Si by spectroscopic ellipsometry

    New search for: Yu, G.
    New search for: Soga, T.
    New search for: Shao, C. L.
    New search for: Jimbo, T.
    New search for: Umeno, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Optical properties of excimer laser annealed polycrystalline Si by spectroscopic ellipsometry

    New search for: Yu, G.
    New search for: Soga, T.
    New search for: Shao, C. L.
    New search for: Jimbo, T.
    New search for: Umeno, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Optical properties of excimer laser annealed polycrystalline Si by spectroscopic ellipsometry

    Contributors:

    Yu, G. (author) / Soga, T. (author) / Shao, C. L. (author) / Jimbo, T. (author) / Umeno, M. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 113/114 ; 489-492

    Publication date:

    1997-01-01

    Size:

    4 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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