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Determination of optical properties of amorphous and crystalline thin films by spectroellipsometry
Determination of optical properties of amorphous and crystalline thin films by spectroellipsometry
Determination of optical properties of amorphous and crystalline thin films by spectroellipsometry
Yamaguchi, T. (author) / Jayatissa, A. H. (author) / Aoyama, M. (author) / Tabe, M. (author)
APPLIED SURFACE SCIENCE ; 113/114 ; 493-498
1997-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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