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Process monitoring of semiconductor thin films and interfaces by spectroellipsometry
Process monitoring of semiconductor thin films and interfaces by spectroellipsometry
Process monitoring of semiconductor thin films and interfaces by spectroellipsometry
Brenot, R. (author) / Drevillon, B. (author) / Bulkin, P. (author) / Roca i Cabarrocas, P. (author) / Vanderhaghen, R. (author)
APPLIED SURFACE SCIENCE ; 154-155 ; 283-290
2000-01-01
8 pages
Article (Journal)
English
DDC:
621.35
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