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Selective dry etching using inductively coupled plasmas - Part I. GaAs/AlGaAs and GaAs/InGaP

Hays, D.C. / Cho, H. / Jung, K.B. / Hahn, Y.B. / Abernathy, C.R. / Pearton, S.J. / Ren, F. / Hobson, W.S.

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Selective dry etching using inductively coupled plasmas - Part I. GaAs/AlGaAs and GaAs/InGaP

Hays, D.C. / Cho, H. / Jung, K.B. / Hahn, Y.B. / Abernathy, C.R. / Pearton, S.J. / Ren, F. / Hobson, W.S.

Selective dry etching using inductively coupled plasmas - Part I. GaAs/AlGaAs and GaAs/InGaP

Hays, D.C. / Cho, H. / Jung, K.B. / Hahn, Y.B. / Abernathy, C.R. / Pearton, S.J. / Ren, F. / Hobson, W.S.

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Title:

Selective dry etching using inductively coupled plasmas - Part I. GaAs/AlGaAs and GaAs/InGaP

Contributors:

Hays, D.C. (author) / Cho, H. (author) / Jung, K.B. (author) / Hahn, Y.B. (author) / Abernathy, C.R. (author) / Pearton, S.J. (author) / Ren, F. (author) / Hobson, W.S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 147 ; 125-133

Publication date:

1999-01-01

Size:

9 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Hays, D. C. / Cho, H. / Lee, J. W. et al. | British Library Online Contents | 2000

Selective dry etching using inductively coupled plasmas - Part II. InN/GaN and InN/AlN

Hays, D.C. / Cho, H. / Jung, K.B. et al. | British Library Online Contents | 1999

Photoluminescence characterization of InGaP/GaAs/InGaP quantum wires

Kicin, S. / Novak, J. / Hasenohrl, S. et al. | British Library Online Contents | 2001

Kinetics of etching in inductively coupled plasmas

Kim, M. T. | British Library Online Contents | 2004

Inductively coupled plasma etching of III-V semiconductors in BCl"3-based chemistries - I. GaAs, GaN, GaP, GaSb and AlGaAs

Maeda, T. / Lee, J.W. / Shul, R.J. et al. | British Library Online Contents | 1999