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ALE-reactor for large area depositions

Skarp, J. I. / Soininen, P. J. / Soininen, P. T.

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ALE-reactor for large area depositions

Skarp, J. I. / Soininen, P. J. / Soininen, P. T.

ALE-reactor for large area depositions

Skarp, J. I. / Soininen, P. J. / Soininen, P. T.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

ALE-reactor for large area depositions

Contributors:

Skarp, J. I. (author) / Soininen, P. J. (author) / Soininen, P. T. (author)

Published in:

APPLIED SURFACE SCIENCE ; 112 ; 251-254

Publication date:

1997-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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